Etching Innerlayers

by Rudy Sedlak
RD Chemical Company
  1. Introduction

  2. Etching Equipment and Configuration

  3. Etch Conditions and Operating Parameters

  4. The Chemistry of the Cupric Chloride Etching Process

  5. Chemistry of the Cupric Chloride and Ammoniacal Etchants
    Replenishment of the Cupric Chloride Etchant
    The Chemistry of the Ammoniacal Etch
  6. Waste Treatment

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Page last updated on 12/09/99.